TENSOR
All Case Studies
Silicon Frontier

Next-Gen Chip Manufacturing

Enabling next-generation semiconductor manufacturing with QUANTUM-L nanoscale lithography.

5nm
Resolution
200 WPH
Throughput
92%
Yield

01The Challenge

Achieving 5nm resolution for advanced semiconductor nodes while maintaining throughput of 200 wafers per hour.

02The Solution

Integrated QUANTUM-L EUV lithography system with magnetic levitation stage, enabling atomic-scale precision at production speeds.

Machine Deployed

QUANTUM-L

Series Sigma · Precision & Tolerance

View Machine

03The Results

Resolution
5nm
Throughput
200 WPH
Yield
92%
"

QUANTUM-L is the cornerstone of our 5nm process. The precision is simply unmatched in the industry.

Dr. James Liu
CTO, Silicon Frontier
Silicon Frontier

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